Isotropic carbon materials are machined, purified and densely coated with highly pure SiC using a heated CVD method The SiC-coated carbon products are widely used for semiconductor productions, anti-corrosive and heat-resistant members, and so on.
Features
[ SiC-coated carbon products ]
High purity, high strength and high anti-corrosive characteristics.
High-precision and complex-form products. Lower cost than normal ceramics.
Standard coating thickness of SiC: 120 +- 30 m (twice coating)
* Available up to 40 to 300 m by request.
Photo: Observed CVD - SiC
Guide to products
[ Example of properties of carbon based material and SiC coating ]
Carbon material
Bulk density [Mg/m3]
1.78
Bending strength [MPa]
48
Shore hardness [Hs]
60
Coefficient of thermal expansion [-/K]
4.8 x 10-6
Specific resistance [m]
11.0
Coefficient of thermal conductivity [W/mK]
120
SiC coating
Crystal structure
-SiC (3C)
Bulk density [Mg/m3]
3.2
Bending strength [MPa]
340
Hardness [Hs]
3500
Coefficient of thermal expansion [-/K]
4.4 x 10-6
Specific resistance [m]
~ 0.2
Coefficient of thermal conductivity [W/mK]
58
Porosity [%]
0
Product size: Available up to 860 x 900 L
* May not be available depending on the specific shape and size requirements, even if within the above range.
Features
m (twice coating)
m]
-SiC (3C)
860 x 900 L